Integration of open space/dummy metal at CAD for physical debug of new silicon

ABSTRACT

An access pad is used to provide access to a functional block of an integrated circuit (IC) device. The access pad is formed using dummy metal in an open space in a metallization level that is between a top metallization level and a base level on which the functional block is formed in the IC device. The access pad at the metallization level provides a contact to access an underlying circuit of the functional block so that the functional integrity of the functional block of the IC device can be verified during probing.

CLAIM OF PRIORITY

This application is a continuation of prior application Ser. No.12/035,403, now U.S. Pat. No. 8,056,025, filed on Feb. 21, 2008, thedisclosure of which is incorporated herein by reference in its entirety.

BACKGROUND OF THE INVENTION

Over the past generation, integrated circuits have grown in complexityto accommodate the ever demanding thirst for higher power and greaterperformance. With the increasing complexity of integrated circuits(ICs), there has been a tremendous push to improve reliability of thefinished product. Great progress has been made in all phases offabrication to provide reliable finished products. Reliability ofintegrated circuits is of paramount importance as it affects the overallquality of the finished product and, ultimately, the return oninvestment.

Failure analysis has become a critical requirement during a new productdesign. Failure analysis includes applying a selected voltage through acircuit input and observing the circuit output voltage by using probes.The probes are connected to the contacts of the underlying circuits andthe input and output voltages at the circuits are measured through theprobes. Due to the sheer volume of contacts and due to space limitationsat the surface of the IC device, the number of probes that may bepractically connected to the contacts is limited thereby reducing thenumber of circuits that may be probed. Additionally, the packageconfiguration, such as a flip chip package, of the IC device makesapplying these probes and examining the input and output voltagesthrough these probes extremely difficult.

Further, conventional probes provide contact level characterizationrather than cell level characterization. As a result, when a failureoccurs during a test, the traditional probe identifies the location ofthe failure at a transistor level. In order to determine which of theunderlying circuits caused a failure, the IC device has to be planarizedto the transistor level and each transistor tested for integrity. As thenumber of transistors can be extremely large, this type of failureanalysis testing is both time consuming and costly.

It would be advantageous to have a scheme that will provide a cell levelcharacterization rather than contact level characterization of the ICdevice. It would also be advantageous if the scheme works for all typesof package configuration. It would also be advantageous to have a schemethat addresses the spatial limitation at the surface of the IC devicefor placing the probe so that the number of circuits that can be testedis not limited by the spatial limitation at the top surface of the ICdevice.

BRIEF SUMMARY OF THE INVENTION

Broadly speaking, the present invention fills these needs by providing amethod of using open space available at various metallization levels ofthe IC device for placing access pads. The access pads located at thevarious metallization levels use dummy metals available at the openspaces. These access pads are electrically connected to the underlyingcircuit and are used as probes to verify the integrity of the IC devicecircuitry.

One embodiment includes a method for providing IC device (chip) probing.Critical circuits and critical nodes associated with the criticalcircuits of the IC device are identified from the actual design of theIC device using Computer Aided Design (CAD) tool, netlist andinterconnectivity information. The critical circuits and critical nodesin the critical circuits form a functional block. The functional blockprovides a particular function, such as memory management, etc. An openspace is identified at a metallization level between the topmetallization level and a base level where the functional block of theIC device is located. The metallization level within the IC device isselected such that it includes less dense features and more open spacethan the underlying levels so that placing of an access pad is feasible.An access pad is created in the identified open space. The access pad iselectrically connected to the underlying functional block of the ICdevice to enable verification of the integrity of the critical nodes inthe functional block of the IC device.

During testing, when a functional block of the IC device fails, anappropriate access pad that connects to the functional block withfailure is identified. The access pad provides a contact to theunderlying circuit of the functional block and is used in probing theplurality of critical nodes of the functional block from a highermetallization level to identify the location, analyze and debug thefailure at the functional block of the IC device.

Other aspects and advantages of the invention will become more apparentfrom the following detailed description, taken in conjunction with theaccompanying drawings, illustrating by way of example the presentinvention.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will be readily understood by the followingdetailed description in conjunction with the accompanying drawings, andlike reference numerals designate like structural elements.

FIG. 1A depicts a top view of a metallization level with a plurality ofopen spaces and an access pad, in one embodiment of the presentinvention.

FIG. 1B illustrates a side cross-sectional view of an IC device having aplurality of metallization levels and a critical node of a functionalblock, in one embodiment of the present invention.

FIG. 2A illustrates a top view of a front side access to a critical nodeof a functional block for a wire bond package, in one embodiment of theinvention.

FIG. 2B illustrates a schematic diagram of a critical signal pathbetween an access pad and a critical node using front side access, inaccordance with one embodiment of the present invention.

FIG. 3A illustrates a top view of a back side access to a critical nodeof a functional block for a flip chip package, in one embodiment of thepresent invention.

FIG. 3B illustrates a schematic diagram of a critical signal pathbetween an access pad and a critical node using back side access, inaccordance with one embodiment of the present invention.

FIG. 4 illustrates a flow chart of operations involved in providingaccess to a critical node from a higher metallization level through anaccess pad, in accordance with one embodiment of the present invention.

FIG. 5 illustrates a flow chart of operations involved in providingphysical debugging of a functional block from a higher metallizationlevel, in accordance with one embodiment of the present invention.

DETAILED DESCRIPTION

In the following description, numerous specific details are set forth inorder to provide a thorough understanding of the present invention. Itwill be apparent, however, to one skilled in the art that the presentinvention may be practiced without some or all of these specificdetails. In other instances, well known process operations have not beendescribed in detail in order not to unnecessarily obscure the presentinvention.

The present invention provides a probing scheme for analyzing anddebugging an integrated circuit (IC) device. According to this scheme, afunctional block is identified within the IC device. The functionalblock includes a plurality of circuits and a plurality of critical nodesthat make up each of the plurality of circuits. The circuits andcritical nodes of the functional block are identified from the design ofthe IC device using a Computer Aided Design (CAD) tool, netlist andinterconnectivity information. An appropriate metallization level withone or more open spaces is identified between a top metallization leveland a level where the identified functional block of the IC device islocated. The level where the identified functional block of the ICdevice is located is considered as the base level. The appropriatemetallization level is identified such that it includes less densefeatures and more open spaces than the underlying metallization levelsso that placing of an access pad at one or more of the open spaces toconnect to the underlying circuitry is feasible. An open space in theappropriate metallization level is identified and an access pad isformed at the identified open space using the available dummy metal. Theaccess pad is connected to the functional block at the base levelthrough a contact. The access pad provides higher level access to theunderlying circuit of the IC device for analysis and debugging.

The advantages of using this probing scheme are numerous. By using theunused open spaces in the various metallization levels between the topmetallization level and the base of the IC device for forming accesspads to probe the underlying circuit of a functional block, optimal useof available space in the IC device is achieved in a cost effectivemanner. As the functional blocks may be accessed from the available openspaces within the IC device, access to the critical nodes is not limitedby the peripheral or surface dimensions of the IC device die. As moreand more features and functional blocks are added to the IC device,access to the newly formed features and functional blocks within the ICdevice may be accomplished without having to sacrifice access to otherfunctional blocks due to spatial constraint. The current probing schemeenables functional block (cell) level characterization. The cell levelcharacterization is helpful in efficiently isolating and debuggingfailures and for performing analysis. Additionally, this scheme providesaccess to underlying circuit for all types of package configuration,such as front and back side access, for probing.

FIG. 1A illustrates a top view of a metallization level of a siliconsubstrate 10. The metallization level is located in between a topmetallization layer and a base layer on which a circuitry of afunctional block to be probed is located. The metallization layerincludes a plurality of dummy metal areas 125 and an access pad 100, inone embodiment of the invention. The dummy metal areas 125 are openunused spaces having dummy metal fillings and are formed duringfabrication of the IC device.

As part of designing the IC device, a plurality of fabricationoperations are used to form various features on a silicon substrate inaccordance with an approved design model for the IC device. In one suchfabrication, a dummy metal, such as copper, is used in a planarizationoperation, such as chemical mechanical polishing (CMP), to enhanceplanarizing of the silicon substrate so that additional features may beformed. In order to provide a substantially planarized substratesurface, the dummy metal fills some of the open spaces thereby formingdummy metal areas 125. As additional features are added vertically onthe silicon substrate, some of these dummy metal areas 125 at variousmetallization levels are left unused. An unused dummy metal area (openspace) 125 at the appropriate metallization level, that is between thetop metallization level and the base level, is identified duringfabrication using the Computer Aided Design tool along with netlist andinterconnect information. An access pad is created in the identifiedopen space 125 using the available dummy metal, as illustrated in FIG.1A. The identification of unused open space 125 in the appropriatemetallization level and creation of the access pad is based on locationand nature of the underlying critical nodes to be monitored or probed.

FIG. 1B illustrates a schematic cross-sectional view of an integratedcircuit device formed on a silicon substrate 10 having a plurality ofmetallization levels M1, M2, M3, . . . Mx. The IC device includes aplurality of functional blocks 300 with each of the functional blocks300 having a plurality of critical circuits and with each criticalcircuit having a plurality of critical nodes. A functional block 300, asused in this application, is defined as one or more electronic circuitswith a plurality of nodes arranged into blocks associated with aparticular function, such as memory blocks, digital signal processing,etc. A node, as used in this application, is defined as any point on theelectrical circuit of the IC device. For instance, a node may be aninput or output terminal of a logic gate within an electronic circuit.

In order to provide access to the functional blocks 300 from a highermetallization level, critical circuits of the IC device that needmonitoring are first identified. The critical circuits include aplurality of critical nodes. In one embodiment, the critical circuit andcritical nodes are identified based on gross physical failures that mayoccur on these nodes rendering the IC device inoperable. In oneembodiment, a CAD tool in conjunction with netlist and interconnectioninformation from an actual design of the IC device may be used inidentifying these critical circuits and critical nodes. The criticalcircuits and the critical nodes are part of a functional block.

As part of design and fabrication of the IC device, a plurality offabrication operations are used in forming various features, such aselectronic circuitry with one or more nodes. Additional metallizationlayers are formed vertically over the circuitry and features formed overthe metallization layers are connected to the underlying circuitrythrough metal interconnects. One or more critical circuits of theunderlying circuitry are identified along with critical nodes in each ofthe critical circuits based on gross physical failures that may occur onthese nodes. Following the identification of the critical nodes, one ormore unused open spaces with dummy metals (dummy metal areas 125) areidentified at an appropriate metallization level between the topmetallization level Mx and a base level M1 where the identified criticalnodes in the underlying circuitry of the functional block 300 ispresent. The appropriate metallization level is chosen such that thereare less dense features and more unused open spaces than the underlyingmetallization levels so that providing an access pad to access densefeatures of the functional block is feasible. In one embodiment, a CADtool may be used in identifying the unused open spaces at theappropriate metallization level. An appropriate open space is thenchosen from the plurality of open spaces at the metallization level suchthat the critical nodes of the critical circuit are easily accessed fromthe chosen open space. An access pad 100 is created at the chosen openspace using the dummy metal available at the open space. The access padis created during the fabrication of the IC device. The access pad iselectrically connected to the underlying circuit through a critical path200 that includes vias 115 that traverse through multiple levels of theIC device.

As illustrated in FIG. 1B, a critical circuit to be monitored isidentified as being located in functional block 300. The identifiedcritical circuit at the functional block 300 is accessed through anaccess node 130 at metallization level M1. An unused open space near theunderlying critical circuit of the functional block 300 is identified ata metallization level M3 between a top metallization level Mx and a baselevel M1. An access pad 100 is formed at the identified open space usingdummy metal available at the open space. The access pad 100 is thenelectrically connected to the underlying circuit of the functional block300 through access node 130 in metallization level M1 and critical path200. The critical path 200 includes vias 115 that traverse multi-levels(M3 and M2) of the IC device.

Once the access pads 100 have been built at various metallization levelsand connected to the appropriate functional blocks of the IC device, theaccess pads 100 can be used in analyzing the IC device circuit. Duringactual testing of a physical design, when a failure is encountered at aparticular functional block 300, a portion of the IC device encompassingthe functional block 300 that has the failure is planarized down to themetallization level at which an access pad 100 is available. Forinstance, as illustrated in FIG. 1B, during failure analysis, a portionof the IC device containing the functional block 300 having a failure isplanarized from metallization layer Mx (where x is an integer greaterthan 3) down to metallization level M3 where an access pad connecting tothe functional block 300 is available. An electrical signal is sentthrough the access pad 100 and critical path 200 to the functional block300 to verify the integrity of the functional block and to identify thelocation of the failure.

It should be noted that although the current embodiment was describedfor accessing the critical nodes at the functional block 300 from thetop (front side), the embodiment could be extended to provide back sideaccess to the functional block 300 through an access pad 100′ extendingfrom the underside of the IC device as illustrated in FIG. 1B.

FIG. 2A depicts a top-view of a metallization layer on which an accesspad 100 is formed to access a functional block 300 from the front side,in one embodiment of the invention. In this embodiment, the packagingconfiguration used is a wire bond package. A plurality of open spaceswith dummy metal, dummy metal areas 125, is identified at metallizationlevel M5 to access underlying circuit of a functional block 300 atmetallization level M4. An access pad 100 is formed in the metallizationlevel M5 at an open space that is near the underlying circuit and vias115 are formed between the metallization level M4 and M5 to enable theaccess pad 100 to access the circuitry for the functional block 300 fromaccess node 130 at metallization level M4. Once the access pad 100 isformed, the access pad 100 is used in sending electrical signals to thefunctional block through the underlying circuit located in metallizationlevel M4 to identify the location of the failure.

During a reliability testing of an IC device, when a failure isencountered, a portion of the IC device that includes a portion of thefunctional block 300 with a failure is planarized to a metallizationlevel where an access pad 100 to the functional block 300 is located.This may include planarizing both metallization levels and metalpassivation levels that may have been formed on top of the metallizationlevels to preserve the functionality of the metal features formedtherein. In order to ensure that the planarizing of the IC device downto the metallization level is precise and does not damage the underlyingcircuit, features, access pad or the metallization level on which theaccess pad is located, the exact location of the access pad isdetermined and used during planarizing. In one embodiment, theplanarizing to an access pad is done by a Focused Ion Beam (FIB) toolusing the location coordinates (x and y coordinates) of the access pad100 to expose a contact of the access pad. The FIB tool uses an ion beamof atoms, such as Gallium, to provide a more focused planarizing. Theexposed contact at the access pad is used to send to and receiveelectrical signals from the underlying functional block 300 to determinethe cause of the failure.

FIG. 2B illustrates a schematic diagram of a critical signal path 210followed by an electrical signal between an access pad 100 and acritical node in the critical circuit using front side access, in oneembodiment of the invention. As shown, an electrical signal initiated atthe access pad 100 travels through the various metallization levels andthrough vias 115 of critical path 210 to the underlying circuit of thefunctional block 300. In response to the electrical signal from theaccess pad 100, a return signal is sent from the underlying circuit backto the access pad 100. By analyzing a waveform of the signal, from eachof a plurality of critical nodes in the functional block, the locationof the failure can be identified and cause of failure determined.

FIG. 3A illustrates a top-view of a metallization layer on which anaccess pad 100 is formed to access a functional block from the backside, in one embodiment of the invention. In this embodiment, thepackaging configuration used is a flip chip package. A flip chip packageis a packaging configuration wherein the active area of the IC device is“flipped over” facing downward. As a result, the entire surface of theflip chip die is used for establishing interconnects. The flip chippackaging allows for large number of interconnects with shorter signalpaths while reducing the interconnect inductance and capacitance, whichconsequently improves electrical performance. Due to the elimination ofwire bond interconnect, flip chip packaging results in a reduced packagesize.

Referring back to FIG. 3A, an access pad formed in an unused open spacewith dummy metal is identified at metallization level M3 to access anoverlying circuit of a functional block at metallization level M4. Themetallization level M3 is accessed through the back side of the ICdevice by drilling an access hole in the back side of the IC device. Theaccess hole may be drilled using a precision drilling tool such as aFocused Ion Beam (FIB) tool so that underlying and overlying featuresare not damaged. Once the access hole is drilled, an access pad 100embedded in the metallization level M3 is found along with vias 115formed between the metallization level M4 and M3 to allow the access pad100 to access the circuit for the functional block 300 from the backside. The access pad 100 includes a contact through which electricalsignals are sent to and received from the critical circuits of thefunctional block 300 located in metallization level M4 to pinpoint thelocation and analyze the cause of the failure.

FIG. 3B illustrates a schematic diagram of a critical signal path 210followed by an electrical signal between an access pad and a criticalnode in the critical circuit using back side access, in one embodimentof the invention. As shown, an electrical signal initiated at the accesspad travels through the various metallization levels and through thevias 115 in critical path 210 to the critical circuit of the functionalblock 300. In response to the electrical signal from the access pad 100,a return signal is sent from the underlying circuit back to the accesspad 100. By analyzing a waveform of the electrical signal, from each ofa plurality of critical nodes in the functional block, the location ofthe failure can be identified and the cause of failure determined.

With the above general understanding of the present invention, a methodto provide an on chip probe for an integrated circuit device will now bedescribed with reference to FIG. 4. During the design phase of anintegrated circuit (IC) device netlist and interconnectivity informationare defined for the given IC device design, as illustrated in operation405. Upon finalizing the design of the IC device, a plurality ofcritical circuits and critical nodes within the critical circuits areidentified, as illustrated in operation 410. The critical circuits andcritical nodes may be identified using a CAD tool, generated netlist andinterconnectivity information. In one embodiment, a test is run on theIC device and the critical circuits and critical nodes are identifiedusing CAD tool, netlist and interconnectivity information based on thetest run.

In operation 415, an unused open space is identified at an appropriatemetallization level that lies between a top metallization level and abase level, where a functional block to be probed is located. Theappropriate metallization level where the access pad is to be located iscarefully chosen by analyzing the design using the CAD tool, netlist andinterconnectivity information such that placement of an access pad willnot damage the features that are already formed. The unused open spaceis chosen such that the open space is near the identified critical nodesof the critical circuit so that the critical nodes can be easilyaccessed.

In operation 420, an access pad is created at the identified open spacein the appropriate metallization level of the IC device. The access padis formed at the open space of the metallization level such that theoverall functionality of the IC device is not compromised. In operation425, access to the underlying critical circuit of the functional blockis provided through the access pad. A critical path to access theunderlying critical circuit from the access pad is provided by formingone or more vias from the metallization level where the access pad isembedded to the base level where the critical circuit of the functionalblock is located. The access is enabled by electrically connecting theaccess pad to the underlying circuit of the functional block through thevias. The vias may spawn multi-levels. The access pad is used inaccessing the critical nodes of the IC device from a highermetallization level during failure analysis. Thus, the embodiments ofthe present invention provide a functional block level characterizationof a failure from a higher metallization level and then allow probing ata functional block level to identify a critical node that causes thefailure.

FIG. 5 illustrates a flow chart of operations involved in providing aphysical debugging tool for an IC device, in an embodiment of theinvention. During a test run, a functional block of the IC device mayencounter failure, such as an I/O failure due to delay in timing signal.In order to analyze the cause of the failure, one or more access padsavailable at the IC device are used to obtain cell levelcharacterization of failure.

In operation 505, a functional block of the IC device having a failureis identified. The identification of the functional block with a failureis done during the testing phase of the IC device. The functional blockmay include one or more critical circuits with a plurality of criticalnodes. The functional block is located at a base level of the IC device.The IC device includes a plurality of metallization levels and aplurality of access pads that connect to the underlying circuits of oneor more functional blocks. The access pads were formed during a designphase of the IC device at various metallization levels between a topmetallization level and a base level where the functional block islocated and connected through critical paths to the underlying criticalcircuits.

In operation 510, an appropriate access pad with a critical path to thefunctional block is identified. The appropriate access pad is identifiedbased on the packaging configuration used to package the IC device sothat the functional block having an identified failure may be easilyaccessed.

In operation 515, the identified access pad at the desired metallizationlevel is used in probing the plurality of critical nodes of the ICdevice to identify the location and cause for failure. The access pad atthe metallization level is accessed by planarizing a portion of the ICdevice having the functional block with a failure to the metallizationlevel where the access pad is located. This is accomplished by obtainingcoordinates of the precise location of the identified access pad andusing a planarizing tool, such as FIB tool, to planarize the portion ofthe IC device to the metallization level of the access pad based on thecoordinates so that a contact at the access pad is exposed withoutdamaging adjacent features. This scheme enables accessing the functionalblock irrespective of the type of package configuration of the ICdevice. An electrical signal may be transmitted through the contact ofthe access pad to the underlying functional block to locate and analyzethe failure.

In order to debug a failure or analyze a critical circuit, electricalsignals are sent to and received from the various critical nodes in eachcritical circuit. Waveforms for each critical circuits of a functionalblock are generated from these electrical signals. The generatedwaveforms for the critical circuits of each functional block are thencompared against a waveform from a control functional block to determineany abnormalities in the waveform. The abnormalities of each waveformmay then be interpreted to determine the cause of a failure.

It should be noted that the functional blocks with a plurality ofcritical circuits discussed in the various embodiments throughout theapplication are typically located in the outer Input-Output (JO) ring ofan IC device. The multiple functional blocks in the I0 ring may besegmented based on location of a failure and some of the segmentedfunctional blocks may be eliminated from analysis or testing therebyreducing the time needed for testing and failure analysis. Thus, theprobing scheme of the present invention allows for a more focusedfailure analysis. The present invention may be successfully used forcell level characterization, power consumption studies, fault analysis,power-on-reset/phase-lock-loop/fuse characterizations and for designverification/debugging.

The embodiments, described herein may be employed with any integratedcircuit, such as processors and programmable logic devices (PLDs).Exemplary PLDs include but are not limited to a programmable array logic(PAL), programmable logic array (PLA), field programmable logic array(FPLA), electrically programmable logic devices (EPLD), electricallyerasable programmable logic device (EEPLD), logic cell array (LCA),field programmable gate array (FPGA), application specific standardproduct (ASSP), application specific integrated circuit (ASIC), just toname a few.

The programmable logic device described herein may be part of a dataprocessing system that includes one or more of the following components;a processor; memory; I/O circuitry; and peripheral devices. The dataprocessing system can be used in a wide variety of applications, such ascomputer networking, data networking, instrumentation, video processing,digital signal processing, or any suitable other application where theadvantage of using programmable or re-programmable logic is desirable.The programmable logic device can be used to perform a variety ofdifferent logic functions. For example, the programmable logic devicecan be configured as a processor or controller that works in cooperationwith a system processor. The programmable logic device may also be usedas an arbiter for arbitrating access to a shared resource in the dataprocessing system. In yet another example, the programmable logic devicecan be configured as an interface between a processor and one of theother components in the system. In one embodiment, the programmablelogic device may be the STRATIX® II GX devices owned by the assignee.

While this invention has been described in terms of several embodiments,it will be appreciated that those skilled in the art upon reading thepreceding specifications and studying the drawings will realize variousalterations, additions, permutations and equivalents thereof. Therefore,it is intended that the present invention includes all such alterations,additions, permutations, and equivalents as fall within the true spiritand scope of the invention.

1. An integrated circuit (IC) device, comprising: a functional blockformed at a base level of the IC Device, the functional block includinga plurality of circuits having a plurality of nodes; an access padformed in a metallization level of the IC Device, the metallizationlevel located between a top metallization level and the base level onwhich the functional block is formed, the access pad providing access tothe functional block of the IC device, wherein access to the access padis unavailable from external surfaces of the IC device.
 2. The IC deviceof claim 1, wherein the access pad is electrically coupled to anunderlying circuit of the functional block through multi-level vias. 3.The IC device of claim 2, wherein the access pad is formed using a dummymetal in the metallization level of the IC device, the metallizationlevel of the IC device having a lesser amount of dense features and agreater amount of open space relative to a metallization level of thefunctional block.
 4. The IC device of claim 2, wherein access to theunderlying circuit is packaged in one of a flip chip packageconfiguration or wire bond package configuration of the IC device. 5.The IC device of claim 4, wherein the functional block is located on theInput-Output (IO) ring of the IC device.
 6. The IC device of claim 2,wherein the IC device is a programmable logic device (PLD).
 7. Anintegrated circuit (IC) device, comprising: a functional block formed ata base level of the IC device, the functional block including aplurality of circuits having a plurality of nodes; and an access padformed in a metallization level of the integrated circuit, themetallization level located between a bottom metallization level and thebase level on which the functional block is formed, the access padproviding access to the functional block of the IC device, whereinaccess to the access pad is unavailable from external surfaces of the ICdevice and the IC device is packaged in a flip chip package, and whereinthe access pad is electrically coupled to an overlying circuit of thefunctional block through multi-level vias.
 8. The IC device of claim 7,wherein the access pad and multi-level vias are unused during operationof the IC device.
 9. The IC device of claim 7, wherein the access pad isaccessible through planarization of the IC device.
 10. The IC device ofclaim 7, wherein the access pad is located in an open space of the ICdevice during design of the IC device.
 11. The IC device of claim 10,wherein the access pad is a dummy metal area within the design of the ICdevice.
 12. The IC device of claim 7, wherein the functional block islocated in an Input/Output ring of the IC device.